Entegris and JSR Enter Cross-Licensing Agreement for EUV Lithography

Entegris, Inc. is a supplier of critical advanced materials and process solutions for semiconductors and other high-technology industries. Its segments include Materials Solutions (MS) and Advanced Purity Solutions (APS). The MS segment provides materials-based solutions, such as chemical vapor and atomic layer deposition materials, chemical mechanical planarization (CMP) slurries and pads, ion implantation specialty gases, formulated etch and clean materials, and other specialty materials. The APS segment offers filtration, purification and contamination-control solutions that improve customers’ yield and device reliability by ensuring the purity of critical liquid chemistries and gases and the cleanliness of wafers and other substrates used throughout semiconductor manufacturing processes, the semiconductor ecosystem and other high-technology industries. It has manufacturing, customer service and/or research facilities in the United States, Canada, China, Germany and others.